oe-29-3-3342.pdf Pubblico

Dettagli File

Depositante

Ryan W Caillet

Data Caricato

2022-08-30

La Data Di Modifica

2022-08-30

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Caratterizzazione

File Format: pdf (PDF/A)

File Title: Coherent Fourier scatterometry using orbital angular momentum beams for defect detection

Page Count: 17

File Size: 4545287

Original Checksum: 8efdfdf7bb404a738e09d0f7daf115c3

Mime Type: application/pdf