Article
Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source 公开 Deposited
https://scholar.colorado.edu/concern/articles/z603qz85h
- Abstract
We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.
- Creator
- Date Issued
- 2022
- Academic Affiliation
- Journal Title
- Journal Issue/Number
- 17
- Journal Volume
- 30
- 最新修改
- 2023-08-30
- Resource Type
- 权利声明
- ISSN
- 1094-4087
- Language