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Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source Public Deposited

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https://scholar.colorado.edu/concern/articles/z603qz85h
Abstract
  • We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.

     

Creator
Date Issued
  • 2022
Academic Affiliation
Journal Title
Journal Issue/Number
  • 17
Journal Volume
  • 30
Last Modified
  • 2023-08-30
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ISSN
  • 1094-4087
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