Article
Room-temperature-deposited dielectrics and superconductors for integrated photonics. Public Deposited
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We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near-ambient temperature. All lithography is performed with a 365 nm i-line stepper, facilitating low cost and high scalability. We have shown low-loss SiN waveguides, high-Q ring resonators, critically coupled ring resonators, 50/50 beam splitters, Mach-Zehnder interferometers (MZIs) and a process-agnostic fiber packaging scheme. We have further explored the utility of this process for applications in nonlinear optics and quantum photonics. We demonstrate spectral tailoring and octave-spanning supercontinuum generation as well as the integration of superconducting nanowire single photon detectors with MZIs and channel-dropping filters. The packaging approach is suitable for operation up to 160 °C as well as below 1 K. The process is well suited for augmentation of existing foundry capabilities or as a stand-alone process.
- Creator
- Date Issued
- 2017-05-01
- Academic Affiliation
- Journal Title
- Journal Issue/Number
- 9
- Journal Volume
- 25
- File Extent
- 10322-10334
- Publisher
- Last Modified
- 2020-02-11
- Identifier
- PubMed ID: 28468405
- Resource Type
- Rights Statement
- DOI
- ISSN
- 1094-4087
- Language
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