Citation Formats

MLA

Klein, Eric J, John L Hall, and Fred Ramirez. A Common-path Heterodyne Interferometer for Surface Profiling In Microelectronic Fabrication.

APA

Klein, E., Hall, J., & Ramirez, F. A Common-Path Heterodyne Interferometer for Surface Profiling in Microelectronic Fabrication.

Chicago

Klein, Eric J., John L Hall, and Fred Ramirez. A Common-Path Heterodyne Interferometer for Surface Profiling In Microelectronic Fabrication.