Jenkins, Nicholas W, et al. Coherent Fourier Scatterometry Using Orbital Angular Momentum Beams for Defect Detection.
APA
Jenkins, N., Zhang, Z., Wang, B., Esashi, Y., Murnane, M., Liao, C., Tanksalvala, M., & Kapteyn, H.Coherent Fourier scatterometry using orbital angular momentum beams for defect detection.
Chicago
Jenkins, Nicholas W, Zhe Zhang, Bin Wang, Yuka Esashi, Margaret Murnane, Chen-Ting Liao, Michael Tanksalvala et al.Coherent Fourier Scatterometry Using Orbital Angular Momentum Beams for Defect Detection.