2015 IEEE Photonics Conference (IPC)
We demonstrate efficient photonic devices that rely on sub-100nm features in unmodified 45nm SOI CMOS, including photonic crystals, array-antenna grating couplers, and modulators. We then show monolithically integrated electronicphotonic systems comprising millions of transistors and thousands of photonic devices, including a complete chip-to-chip photonic link.
Pavanello, Fabio; Wade, Mark T.; Notaros, Jelena; Shainline, Jeffrey M; Poulton, Christopher V.; Sun, Chen; Georgas, Michael; Alloatti, Luca; Atabaki, Amir; Kumar, Rajesh; Moss, Ben; Lin, Sen; Ram, Rajeev J.; Stojanović, Vladimir; and Popović, Miloš A., "Efficient nanoscale photonic devices and monolithic electronic-photonic subsystems in sub-100 nm SOI CMOS" (2015). Electrical, Computer & Energy Engineering Faculty Contributions. 16.